Report Outlines
Generic Report Outline | Level I/Level II Qualification Plan Outline | IRONMAN Outline
Generic Report Outline
SEMATECH reports typically include the following information.
Abstract
Author(s): Name(s) of those who actually wrote the report
Approvals:
Author's name if at SEMATECH
Project Manager's Name
Program Manager's Name
Director's Name
ACKNOWLEDGMENTS Optional
Definition of Terms, Abbreviations, and Acronyms Optional
1 EXECUTIVE SUMMARY
2 INTRODUCTION
3 PROJECT OVERVIEW/BACKGROUND
3.1 Project objectives
3.2 Project Strategy
4 EXPERIMENTAL DATA
4.1 Studies/Test Method Overview
4.2 Equipment Information
4.3 Process Information
4.4 Design of Experiments
4.5 Verifications/Evaluation of Procedures
5 SUMMARY/CONCLUSIONS
6 RECOMMENDATIONS
7 WORKS CITED(if needed)
OTHER REFERENCES (if needed)
APPENDIXES (if needed)
SEMATECH Qualification Report Outline
The following is an outline for reporting project activities involving Level I and Level II Qualification Plans (Qual Plan). For a complete description of the required methodology and the strategies used to characterize tools or processes at SEMATECH, refer to Technology Transfer #92061182B-GEN.
Cover Page
Trademarks
Table of Contents
List of Figures
List of Tables
Acknowledgments
1 EXECUTIVE SUMMARY
2 INTRODUCTION
2.1 Assumptions
3 PROJECT DESCRIPTION
3.1 Project Objectives
3.2 Outline of the Project Strategy
3.3 Time Frame
3.4 Competitive Analysis
3.5 Alternatives Considered
3.6 Final Project Description
4 EXPERIMENTAL DATA
4.1 Metrology (or Gauge Capability Studies)
4.2 Materials Characterization
4.3 Equipment-Specific Information
4.4 Passive Data Collection (Baseline, PDC #1)
4.5 Design of Experiments
4.6 Level II Qualification Electrical Performance
4.7 Marathon
5 MANUFACTURING IMPLEMENTATION
5.1 Performance Tracking Systems
5.2 Operating Specification
5.3 Throughput Analysis
5.4 Manufacturing Performance Data
5.5 Manufacturing Support Requirements
5.6 Operator Support Requirements
5.7 Expert System Considerations
6 COST OF OWNERSHIP
7 ENVIRONMENT, SAFETY, AND HEALTH
8 CONCLUSIONS
8.1 Discussion of Results
8.2 Lessons Learned/Recommendations
8.3 Future Plans
8.4 Closing Comments
APPENDIX A
BIBLIOGRAPHY
IRONMANTM REPORT OUTLINE
Improving Reliability Of Machine At Night
(IRONMAN) is a methodology developed by Motorola engineers working
in partnership with a semiconductor process equipment supplier
to be used by equipment suppliers for semiconductor manufacturing
development. These suppliers work with SEMATECH and its members
to deliver to customers the most reliable equipment in the shortest
time possible. The methodology is also used by equipment suppliers
to improve existing equipment and help in the process of developing
the next generation equipment at the lowest cost to meet customer
reliability expectations. Executing the IRONMAN methodology involves
progressing through three stages, as shown in the following figure:
The following is an outline that can be used for documenting a project. Refer to Technology Transfer #95113028A-GEN, SEMATECH IRONMAN Guideline, for full details.
Cover Page
Trademarks
Table of Contents
List of Figures
List of Tables
Acknowledgments
1 EXECUTIVE SUMMARY
2 INTRODUCTION
2.1 Background
2.2 Benefits
2.3 Requirements
2.3.1 Tools and Consumables
2.3.2 Staffing
3 IRONMAN METHODOLOGY
3.1 Preparation Stage
3.1.1 Qualifications
3.1.2 Test Plan
3.2 Improvment Cycle Stage
3.2.1 Requirements/Resources
3.2.2 Find Problems
3.2.3 Identify Root Causes
3.2.4 Implement Fixes
3.2.5 Assess Status of IRONMAN Goals
3.2.6 Renegotiate Project
3.3 Reliability Growth Modeling
3.3.1 Establish Actual Reliability Performance
3.3.2 Identify Lessons Learned
4 SEMATECH APPLICATION SOFTWARE
4.1 FRACAS Database Management System (DBMS)
4.2 Test Data Collection Software (TESTDAC)