Cleanroom

450 mm Guidelines

450 mm ESH Guidlines

  • Guideline for Environmental Characterization of Semiconductor Process Equipment
    This guideline provides equipment suppliers with guidance for environmental characterization of their equipment. This characterization consists of quantifying air emissions, liquid effluents, and solid waste. The guideline also includes a data collection template for presenting and summarizing the test data, as well as recommended protocols for air emissions testing.
  • Application Guide for Manual Material Handling Requirements in SEMI S8
     This document describes the correct application of accepted methods to assess manual material-handling (MMH) tasks to determine compliance with SEMI S8, Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment.
  • SEMI S23 Application Guide and Total Equivalent Energy (TEE) Calc II User's Guide
    The ISMI S23 Total Equivalent Energy Calculator (TEE CalcII) converts various semiconductor manufacturing equipment utility consumption rates into equivalent annual electrical energy usage. The data gathered and calculations made are based on the SEMI S23 energy efficiency and road-mapping guidelines, and are used to report equipment total energy consumption. The link above is for the TEE CalcII User Guide, and the software may be downloaded from https://teecalc.com/default.aspx 
  • Combustible Materials Test Report
    450mm equipment shall be constructed in a manner which is fire safe. One approach for achieving this objective is to limit the amount of combustible sheet plastic used in tool construction. The ISMI Combustible Materials Test Report shall be employed as an aid for classifying the types and amount of combustible sheet plastics used in tool construction.